crius_II_en_00, Edition 06/2010
22 CONFIDENTIAL AIXTRON - Dokumentation
Safety System Manual
General safety regulations for the end user CRIUS II
2
Final checks After maintenance or service work, check to make sure that all safety devices
are mounted and functioning faultlessly. In particular, check the safety devices
subsequent to all work on the electrical system. This is, for example, relevant
for the grounding system and safety circuits.
Revision checks The end user is responsible to perform the revision checks according to the
local regulations concerning prevention of accidents.
At the end of a successful revision check, the acceptance report for revision
check is signed by an authorized representative from AIXTRON and by a spe-
cialist delegated by the end user.
Obligation to report The end user must immediately report any changes or observed irregularities
which occur at the CRIUS II to AIXTRON.
2.2.6 Disposal
The end user must adhere to the pertinent regulations when disposing of the
CRIUS II or components of the system.
Due to the fact that this system utilises toxic gases, the manufacturer does not
recommend reuse of any components within the system.
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