AIXTRON - Dokumentation CONFIDENTIAL 85
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Vacuum system
3.8 Vacuum system
The vacuum system comprises the following components:
• Vacuum pumps
• Manual, pneumatic, solenoid, and electro-pneumatic valves
• Bypass lines with check valves to protect the system
• Exhaust gas filters including a separate water cooling unit
3.8.1 Vacuum pumps
Glove box pump Fig. 3-36, 85 shows the glove box pump. It is used for evacuating the glove
box.
Fig. 3-36 Glove box pump
DOR pump Fig. 3-37, 85 shows the DOR pump. It is used for evacuating the intermedi-
ate volume between the inner and outer O-ring of the DOR system.
Fig. 3-37 DOR pump
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