AIXTRON - Dokumentation CONFIDENTIAL 117
5
crius_II_en_00, Edition 06/2010
System Manual Operation
CRIUS II Operating elements: Glove box
5.2.5 Pedal switches
The pedal switches are used to initiate the following actions:
• Switch on/off the susceptor rotation
• Evacuate the glove box
• Refill the glove box
Fig. 5-10 Pedal switches
A Rotate the susceptor
B Evacuate
CRefill
5.2.6 Vacuum cleaner
A vacuum cleaner is installed inside of the glove box. See Fig. 5-11, 117. It
is used to remove residues. It can be switched on and off with the control box.
See Chapter 5.2.4 Control box inside of the glove box, 116.
Fig. 5-11 Vacuum cleaner
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