AIXTRON CRIUS II - Exhaust Filter Unit

AIXTRON - Dokumentation CONFIDENTIAL 91
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Vacuum system
3.8.4 Exhaust filter unit
The CRIUS II is equipped with an exhaust filter unit. The two-stage filter
system comprises an upstream cooling trap and a downstream particle filter.
Fig. 3-44 Exhaust filter unit (standard)
ABall valve
The following exhaust filter unit is optionally available.
Fig. 3-45 Exhaust filter unit (standard)
ABall valve