AIXTRON - Dokumentation CONFIDENTIAL 97
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Safety Control System (SCS)
3.10 Safety Control System (SCS)
The CRIUS II is equipped with a safety control system preventing any unsafe
state of the system.
The SCS monitors all signals, valve positions, sensors, and analog limit val-
ues. It operates stand-alone and is superior to the control computers. The SCS
switches the system to a safe state if a dangerous situation occurs. Alarms
and system states are displayed in AIXACT.
The SCS is located in the electrical cabinet.
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