crius_II_en_00, Edition 06/2010
154 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Low power supply CRIUS II
6
6.8.2 Checking the fuses
The fuses for the low power supply are located in the electrical cabinet.
Fig. 6-12 Fuses
1 Open the corresponding doors
2 Check the switching function of the fuses by means of a voltmeter
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