AIXTRON - Dokumentation CONFIDENTIAL 133
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Introduction
6.1 Introduction
6.1.1 Personnel qualifications
This chapter is for users who have been allocated the «Technician» authori-
zation level or higher. See Chapter 1.2 User qualifications, 8.
6.1.2 Visual inspections
The CRIUS II concept keeps the amount of required maintenance work to a
minimum. Most of the components do not require any kind of maintenance
work if you observe the stipulations for normal operating conditions. It is suffi-
cient to make regular visual inspections.
In addition, you should always listen for unusual noise and pay immediate
attention to any malfunctioning.
6.1.3 Maintenance contract
AIXTRON recommends to have the entire system overhauled by AIXTRON
service technicians on a regular basis. Various important wear-sensitive
system parts such as vacuum seals, sealing rings, ball bearings, etc. will then
be replaced by new parts. Please contact your local AIXTRON representative
for information about a customer-specific maintenance contract.
6.1.4 Logbook
AIXTRON recommends that a record of all performed maintenance work be
kept in a logbook. This is particularly important if various different personnel
are responsible for maintenance work on one system. A logbook allows the
end user to keep a constant check on the type and date of performed mainte-
nance work.
6.1.5 OEM manuals
Instructions for maintenance work which make reference to any OEM manuals
must be carried out in strict accordance with the stipulations in the relevant
manuals.
6.1.6 Spare parts
Use only original spare parts for maintenance and service work. You find a
spare parts list on the delivered catalog CD «Spare Parts & Services».
For information on spare parts, please send an e-mail to:
service@aixtron.com
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