AIXTRON - Dokumentation CONFIDENTIAL 27
2
crius_II_en_00, Edition 06/2010
System Manual Safety
CRIUS II Danger areas for maintenance and service personnel
2.5.2 Dangers originating from mechanical energy
Fig. 2-3 Danger areas for maintenance and service personnel: Mechanical energy
A Susceptor motor
Item A
Entire system
WARNING! Moving component: Susceptor motor.
Automatic movements of this component may cause contusions.
Check to make sure that no one is in the danger area before you energize
the motor.
WARNING! Pneumatic system.
Opening or damaging pressurized components may lead to serious eye
and skin injuries.
Shut off the pneumatic supply and relieve the pressure before you carry
out any kind of work to these parts.
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