AIXTRON CRIUS II - Weight

crius_II_en_00, Edition 06/2010
12 CONFIDENTIAL AIXTRON - Dokumentation
Use, data System Manual
Dimensions and weight CRIUS II
1
1.5.2 Weight
Tab. 1-1 Weight
Component Weight [kg]
Gas mixing cabinet Approx. 2800 kg
Reactor cabinet Approx. 3800 kg
Heater power supply unit Approx. 900 kg
Transformer Approx. 280 kg
Heat exchanger Approx. 171 kg