AIXTRON CRIUS II - Maintenance Schedule: Heating System; Maintenance Schedule: Vacuum System

crius_II_en_00, Edition 06/2010
140 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Maintenance schedule CRIUS II
6
6.3.6 Maintenance schedule: Heating system
Tab. 6-7 Maintenance schedule: Heating system
6.3.7 Maintenance schedule: Vacuum system
Tab. 6-8 Maintenance schedule: Vacuum system
Action Interval Comments
Date and signa-
ture
Checking the heater coils With suscep-
tor removal
Please contact your local
AIXTRON service center for
more information
Replacing the heater Please contact your local
AIXTRON service center for
more information
Mounting the thermocouple Please contact your local
AIXTRON service center for
more information
Action Interval Comments
Date and signa-
ture
Checking the process pump Monthly See Chapter 6.11.2,  164
Checking the KF clamps Monthly See Chapter 6.11.3,  165
Checking the throttle valve Quaterly See Chapter 6.11.4,  166
Checking the pneumatic
valves
Monthly See Chapter 6.11.5,  167
Replacing the exhaust filter Quaterly Please contact your local
AIXTRON service center for
more information
Performing a leak test of the
complete system
Monthly See Chapter 6.11.6,  168
Perform the leak test accord-
ing to the SEMI standard