AIXTRON CRIUS II - Operating Materials; Solid Waste Materials

crius_II_en_00, Edition 06/2010
136 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Auxiliary devices and used materials CRIUS II
6
6.2.3 Solid waste materials
The following list specifies parts that become solid waste as a result of opera-
tion, maintenance and servicing of the CRIUS II. The disposal of these parts
must be regulated by the end user according to the local safety regulations.
• Gas inlet filters
• Particle filter
• Glove box filters
• Vacuum cleaner filters
• Vacuum wand filters
• Circulation filters
6.2.4 Operating materials
• Cleaning agents
• Lint-free cloth
• Isopropanol (2-propanol)
NOTE:
Parts of the CRIUS II to be decommissioned or replaced may be contam-
inated.
The RMA (Return Material Authorization) procedure exactly describes
the handling of contaminated parts.
WARNING! Unsuitable solvents.
Acetone, methanol and ethanol are unsuitable solvents. These chemi-
cals attack seals made of nitrile and fluorocarbon rubber (e.g. Perbunan
and Viton). In addition, methanol is toxic.
Avoid these solvents. Use isopropanol instead.