AIXTRON CRIUS II - Unintended Release of Liquid

AIXTRON - Dokumentation CONFIDENTIAL 181
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Cooling water system
Fig. 6-41 Adjusting the flow
A Manual valve
Checking the flow
limits
6 Check the upper and lower limit flow settings in the Data Sampler
• If a flow value is out of range an alarm occurs
7 If necessary, correct the limit values in the Data Sampler
6.14.4 Unintended release of liquid
The entire system is equipped with liquid sensors which are connected to the
SCS.
Fig. 6-42 Liquid sensor
If a sensor detects liquid (e.g. cooling agent from a thermostat heat bath), the
SCS automatically triggers the required safety measures.
1 Remove the liquid with a vacuum cleaner which is suitable for liquids
and eliminate the leak