AIXTRON CRIUS II - Manual Susceptor Transfer Handler (Optional)

AIXTRON - Dokumentation CONFIDENTIAL 61
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Load lock
3.4.2 Manual susceptor transfer handler (optional)
A manual susceptor transfer handler may be installed inside the load lock
chamber instead of the drawer. It is used to transfer the susceptor between the
reactor and the load lock chamber.
Fig. 3-6 Manual susceptor transfer handler
A Upper slot
B Lower slot
C Guide with rolls (installed in the glove box)
D Susceptor