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AIXTRON CRIUS II - Safety Instructions

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AIXTRON - Dokumentation CONFIDENTIAL 53
2
crius_II_en_00, Edition 06/2010
System Manual Safety
CRIUS II Safety labels on the CRIUS II
2.12.5 Safety instructions
Label
Position
Fig. 2-25 Label position (front)
SAFETY
INSTRUCTIONS
Read and understand the
Operation Manual and all safety
labels before operating this
system.
Only a trained person is to be
permitted to operate this system.
Training should include instruction
in operating under normal
conditions and emergency
situations.
This system is to be serviced only
by trained and authorized
personnel. Follow lockout
procedures before servicing.
Consult Material Safety Data
Sheets (MSDS) for hazards and
required personal protective
equipment listings.
Never leave the system stopped in
such a manner that another
worker can start the system while
you are working on or within the
system.
Never change or defeat the
function of electrical interlocks or
other system "shutdown" switches.
Routine inspections and
corrective/preventative
maintenance measures are to be
conducted to make sure that all
guards and safety features are
retained and function properly.
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