AIXTRON CRIUS II - Key Switch for Operating Mode

crius_II_en_00, Edition 06/2010
114 CONFIDENTIAL AIXTRON - Dokumentation
Operation System Manual
General operating elements CRIUS II
5
5.1.5 Key switch for operating mode
A key switch is used to switch between maintenance mode and operation
mode.
Position «0»
System is in operation mode
Position «I»
System is in maintenance mode
Fig. 5-5 Key switch for operating mode