AIXTRON - Dokumentation CONFIDENTIAL 137
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Maintenance schedule
6.3 Maintenance schedule
The required maintenance work at CRIUS II system parts must be carried out
at regular intervals. In addition, you should always listen for unusual noise and
pay immediate attention to any malfunctioning which occurs in the system
during the interim period between official system inspection procedures.
Maintenance
logbook
AIXTRON recommends that a record of all maintenance work performed at the
CRIUS II be kept in a logbook. This is particularly important if various different
personnel are responsible for maintenance work on one system. A logbook
allows the end user to keep a reliable check on the type and date of performed
maintenance work.
Layout of the mainte-
nance schedules
Tab. 6-1 Layout of the maintenance schedules
Column Explanation
Action Specifies the specific type of required mainte-
nance work.
Interval Specifies the recommended maintenance inter-
vals.
Comments Here you can find brief notes on maintenance
work or references to relevant chapters or docu-
ments which contain further explanations.
Instructions for maintenance work which make
reference to any OEM manuals must be carried
out in strict accordance with the stipulations in the
relevant manuals. See Chapter 2.1.1 Compul-
sory reading material!, 18.
Date and signature Here you can keep a record of the performed
maintenance work. Make copies of the mainte-
nance schedule for this purpose.
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