AIXTRON CRIUS II - Pinch Points

AIXTRON - Dokumentation CONFIDENTIAL 51
2
crius_II_en_00, Edition 06/2010
System Manual Safety
CRIUS II Safety labels on the CRIUS II
2.12.4 Pinch points
Label 1
Positions • Inside of the glove box on the inner door of the load lock
• At the motor holder under the glove box
Fig. 2-21 Label on the inner lock chamber door and on the motor holder (front)
Fig. 2-22 Label on the motor holder (back)