AIXTRON - Dokumentation CONFIDENTIAL 113
5
crius_II_en_00, Edition 06/2010
System Manual Operation
CRIUS II General operating elements
5.1.4 Signal lamp
The CRIUS II is equipped with signal lamps. They indicate the state of the
CRIUS II.
Fig. 5-4 Signal lamp
The signal colors are defined as follows:
Tab. 5-1 Used signal colors
Color Meaning
Red Error
Yellow Not ready for operation
Green Ready for operation
Blue System is in maintenance mode
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