AIXTRON CRIUS II - Gas System

crius_II_en_00, Edition 06/2010
70 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Gas system CRIUS II
3
3.6 Gas system
The gas mixing system comprises the following components:
• Gas pipe system
• Control components
• Valves
• Mass flow controllers (MFCs) for controlling the gas flows
• Pressure controllers (PCs) for controlling the source pressures
• Gas purifier (optional), see Chapter 3.6.7,  82
• Hydride gas sources, see Chapter 3.6.4,  74
• Metal organic (MO) sources, see Chapter 3.6.5,  76
Fig. 3-19,  70 illustrates the interior of the gas mixing cabinet.
Fig. 3-19 Gas system
A Gas dosing unit for MO source
B Heat bath for thermostat, with MO bubbler