AIXTRON - Dokumentation CONFIDENTIAL 45
2
crius_II_en_00, Edition 06/2010
System Manual Safety
CRIUS II Unintended releases
2.11 Unintended releases
Gases
The probability of occurrence of an unintended gas leak is very low. However,
if a gas leak occurs inside the CRIUS II the exhaust system prevents hazard-
ous situations.
Liquids
The entire system is equipped with liquid sensors to detect leaks at the
CRIUS II immediately. See also Chapter 6.14.4 Unintended release of liquid,
181.
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