crius_II_en_00, Edition 06/2010
176 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Gas system CRIUS II
6
6.13.4 Performing a zero offset of a MFC
At regular intervals, a zero offset of the MFCs should be performed to adjust
minimum flow deviations.
Prerequisites • To guarantee the optimum operating temperature, the system must be
switched on at least 4 hours before performing a zero offset of an MFC.
Preparing the
system
1 In AIXACT, set the setpoint of the corresponding MFC to zero
2 Make sure that the entire system is on atmosphere pressure
3 Close the inlet valves for the process gas supply
4 Wait approx. 3 minutes to guarantee an absolute zero flow
5 In AIXACT, make sure that the deviation of the MFC is less than 1% of
the maximum configurable flow value. Otherwise the MFC must be
replaced.
In AIXTRON systems the following MFC types are used:
• Bronkhorst High Tech, see Fig. 6-36, 176
• Horiba Stec, see Fig. 6-37, 177
Zero offset for
Bronkhorst MFC
1 Press the push button on the back side of the MFC and keep it pressed
• After a short time, the red LED will be illuminated
• Then the green LED will be illuminated
Fig. 6-36 Zero offset for Bronkhorst MFC
A Push button
BLEDs
2 Now release the push button
The zeroing procedure starts and the LEDs will be flashing until the zeroing
procedure is finished.
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