AIXTRON - Dokumentation CONFIDENTIAL 177
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Gas system
Zero offset for
Horiba MFC
1 Press the «ZERO» button on the back side of the MFC using a proper
tool (e.g. small screw driver)
Fig. 6-37 Zero offset for Horiba MFC
A «ZERO» button
The zeroing procedure will be performed automatically.
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