crius_II_en_00, Edition 06/2010
90 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Vacuum system CRIUS II
3
3.8.3 Pressure control unit
The pressure control unit controls the position of the throttle valve and, in turn,
the pressure in the reactor. See Fig. 3-42, 90.
Fig. 3-42 Pressure control unit
Fig. 3-43, 90 shows the pressure gauge that measures the pressure in the
reactor.
Fig. 3-43 Pressure gauge
The pressure gauge forwards the measured pressure to the pressure control
unit. This device adjusts the pressure in the reactor according to the setpoint
value by adjusting the position of the throttle valve.
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