AIXTRON CRIUS II - Opening the Reactor Lid

crius_II_en_00, Edition 06/2010
160 CONFIDENTIAL AIXTRON - Dokumentation
Maintenance System Manual
Reactor CRIUS II
6
6.10.2.1 Opening the reactor lid
The reactor lid is raised for loading the susceptor.
Raising the reactor
lid
1 Make sure that the key switch is in the vertical position. See
Chapter 5.3.2 Key switch,  119.
2 Press the [OPEN] button
• The reactor lid is only cleared for opening if the [OPEN] button is illu-
minated by green light
Fig. 6-20 [OPEN] and [CLOSE] buttons
Lowering the reactor
lid
1 Press the [OPEN] button
• The reactor lid is only cleared for closing if the [CLOSE] button is illu-
minated by green light