crius_II_en_00, Edition 06/2010
188 CONFIDENTIAL AIXTRON - Dokumentation
Storage, disposal System Manual
Disposal CRIUS II
7
7.2.5 Recycling of materials
Materials which are not contaminated with chemicals should be recycled.
The following components are contaminated and must not be recycled:
• Tubing and valves of the process gas system
• Reactor
• Components in the process chamber
These components must be classified as hazardous waste and brought to a
specialized hazardous waste disposal company.
CAUTION! Contaminated materials.
Contaminated materials are harmful for the environment.
Materials which are contaminated with chemicals must not be recycled.
Dispose of these components as hazardous waste according to the reg-
ulations.
NOTE:
The above assessment is based on the baseline process. If the system
is used for other processes, then the user must adapt the recycling and
decommissioning process to ensure safe disposal.
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