AIXTRON - Dokumentation CONFIDENTIAL 189
8
crius_II_en_00, Edition 06/2010
System Manual Appendix
CRIUS II Glossary
8 Appendix
8.1 Glossary
Anode Positive pole of a unit that is operated with direct current.
bar Pressure unit. This unit is obsolete and has been replaced by Pa.
1 bar = 10
5
Pa = 0.1 MPa
Baratron Vacuum gauge (capacitance manometer) for gas-type independent measure-
ments.
Cathode Negative pole of a unit that is operated with direct current.
CVD Chemical vapor deposition. A common method for deposition of thin films. In
a CVD process, volatile compounds are transported into the reactor chamber
via the gas phase. Here they are decomposed on a hot substrate by thermal
energy.
DI water Deionized water. Water that has been purified from minerals by an ion
exchange process. DI water may still contain uncharged impurities such as
organic compounds.
DOR Double O-ring system. Used to create an intermediate vacuum.
EMO Emergency-off. If triggered, the EMO circuit shuts down potentially hazardous
components. EMO buttons are red with a yellow collar.
EMS Emergency-stop. If triggered, the EMS circuit stops the movement of a partic-
ular component. EMS buttons are red. The collar (if present) is not yellow.
End user Legal term for the system owner. The end user is responsible for the installed
system, especially for the safety and training of the personnel.
GMS Gas mixing system. Mixing system for the process gases and the precursors.
GUI Graphic user interface. The interface used for communication between the
user and the system controller. Consists of a screen, a keyboard and a point-
ing device (mouse or trackball).
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