crius_II_en_00, Edition 06/2010
190 CONFIDENTIAL AIXTRON - Dokumentation
Appendix System Manual
Glossary CRIUS II
8
Inert gas Chemically non-reactive process gas, e.g. the noble gas argon.
IPA Isopropyl alcohol. Also known as isopropanol or 2-propanol. A colorless, vol-
atile, and flammable solvent. IPA is an excellent cleaning agent for many appli-
cations.
LOTO Lockout/tagout. Safety procedure which ensures that a component is isolated
from energy. The LOTO procedure must be performed in order to protect
employees servicing the equipment.
mbar Pressure unit. This unit is obsolete and has been replaced by Pa.
1 mbar = 10
2
Pa = 1 hPa
MFC Mass flow controller. Used to control the flow of process gases.
MPa Megapascal. Pressure unit.
1 MPa = 10
6
Pa = 10 bar = 145 psi
MPV Multi-position valve. Each of the multi-position valves has three inlets and one
outlet. The valve has three positions: One of the inlets can be connected to the
outlet at a time. The valve position is set by means of two binary digits.
MSDS Material safety data sheets. Suppliers of chemicals generally include safety
data sheets with delivered chemicals. The safety data sheets contain all safety
related information on the delivered materials. MSDS can also be found on the
Internet.
OEM Original equipment manufacturer. Original manufacturer of a component
which is delivered together with the CRIUS II.
Pa Pascal. Pressure unit.
1 Pa = 1 N/m
2
= 10
-2
mbar = 10
-5
bar = 7.50 mTorr
PLC Programmable logic controller. System controller for the CRIUS II.
PMC Process module controller. Controller for the process module.
psi Pressure unit. This unit is obsolete and has been replaced by MPa.
14.5 psi = 1 bar = 0.1 MPa
RCD Residual current device. If current leaking out of the monitored circuit exceeds
the safety limits, the main switch disconnects. It jumps to the «tripped» posi-
tion.
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