AIXTRON CRIUS II - Gas Purifier

crius_II_en_00, Edition 06/2010
82 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Gas system CRIUS II
3
3.6.7 Gas purifier
Gases purifiers are optionally available in order to obtain ultra-pure gases.
Fig. 3-31,  82 and Fig. 3-32,  82 show examples.
Fig. 3-31 H
2
purifier
Fig. 3-32 N2 - N2 purifier (left) and NH
3
purifier (right)