AIXTRON - Dokumentation CONFIDENTIAL 81
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Gas system
Measuring apparatus for gas concentrations (optional)
Fig. 3-30, 81 shows a measuring apparatus for gas concentrations. It is
used to measure the mixing ratio of two gases and can optionally be integrated
into the gas mixing system.
Fig. 3-30 Measuring apparatus for gas concentrations
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