AIXTRON - Dokumentation CONFIDENTIAL 187
7
crius_II_en_00, Edition 06/2010
System Manual Storage, disposal
CRIUS II Disposal
7.2.4 Disposal: Other assemblies and components
The components of the CRIUS II comprise the following materials:
Tab. 7-2 Materials used in the CRIUS II
Material Examples
Metals and alloys • Aluminum (housing, cover plates, etc.)
• Copper (electric lines)
• Steel (profiles, fixation equipment such
as screws, etc.)
• Stainless steel (process chamber)
Glass • Glass (sight glasses, panes used in dis-
play instruments)
Synthetic material and rubber • Synthetic material (operating elements,
tubing, casing, wheels, etc.)
• Rubber seals, silicon tubing
Composite material • Electrical material (cables, motors,
components)
• Electronic material (printed circuit
boards, PC, monitor, printer)
Packaging • Wood (packing cases)
• Styrofoam (padding material)
• Plastic (foil)
• Iron (nails, wire)
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