AIXTRON CRIUS II - Checking the Control Panel; Glove Box; Replacing the Particle Filters

AIXTRON - Dokumentation CONFIDENTIAL 155
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Glove box
6.9 Glove box
6.9.1 Checking the control panel
1 Check the functions of the control panel (e.g. opening/closing the load
lock)
• See MBraun OEM manual
Fig. 6-13 Control panel
6.9.2 Replacing the particle filters
1 Replace the particle filters in the glove box
• See MBraun OEM manual
Fig. 6-14 Replacing the particle filters