AIXTRON - Dokumentation CONFIDENTIAL 159
6
crius_II_en_00, Edition 06/2010
System Manual Maintenance
CRIUS II Reactor
6.10 Reactor
6.10.1 Hazard alerts
Maintenance and service personnel working on the reactor must pay special
attention to the following safety notes.
6.10.2 Moving reactor components
The following reactor components may be raised and lowered:
• Reactor lid
See Chapter 6.10.2.1, 160
• Reactor chamber
See Chapter 6.10.2.2, 161
• Reactor bottom
Please contact your local AIXTRON service center for more information
WARNING! Hazardous process gases.
The vacuum system may contain hazardous gases which can be detri-
mental for your health.
Always wear a gas mask, gloves and industrial clothing with long
sleeves when opening parts of the vacuum system. Read the safety data
sheets for the gases and follow all instructions.
WARNING! Hot reactor parts.
Reactor parts heat up during the process. After the process they may
still be hot enough to cause burns.
Allow the parts to cool down to room temperature before working in their
vicinity. Wear protective gloves and industrial clothing with long
sleeves.
NOTE:
Do not use the gloves while moving the reactor lid. The light barriers
installed inside of the glove box would interrupt the opening or closing
procedure when you reach into the active area of a light barrier.
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