AIXTRON CRIUS II - Control Unit for the Thermostat Heat Bath; Operating Elements: Gas System

AIXTRON - Dokumentation CONFIDENTIAL 123
5
crius_II_en_00, Edition 06/2010
System Manual Operation
CRIUS II Operating elements: Gas system
5.5 Operating elements: Gas system
5.5.1 Control unit for the thermostat heat bath
Fig. 5-22,  123 shows a control unit for the thermostat heat bath.
Fig. 5-22 Control unit for the thermostat heat bath
A Temperature display
B Temperature control
C On/off switch
D Cooling switch