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Introduces the system manual and its scope regarding system use.
Defines the required qualifications for personnel operating the CRIUS II.
Covers system identification and details found on the type labels.
Details the physical dimensions and weight of the system's components.
Provides data related to system installation and environmental conditions.
States the system's compliance with relevant regulations and standards.
Overview of safety, compulsory reading, and responsibilities for safe operation.
Covers personnel, documentation, transport, operation, maintenance, and disposal safety.
Defines the hazard levels (Danger, Warning, Caution, Note) used in the manual.
Identifies specific hazards and danger zones for personnel operating the system.
Identifies hazards and danger zones relevant to maintenance and service tasks.
Describes the system's safety circuits, including emergency-off buttons.
Details the mandatory lockout/tagout procedure for ensuring safety during work.
Lists the required personal protective equipment for various tasks.
Addresses fire risks associated with electrical components and chemicals.
Specifies the requirements and standards for gas sensing equipment.
Discusses procedures and safety measures for unintended gas or liquid releases.
Details various safety labels, their meanings, and positions on the system.
Contains supplementary information relevant to the safety chapter.
Explains CVD process, reaction steps, and the system's technical design.
Presents the main components and design of the CRIUS II system.
Details the glove box, reactor installation, and access methods.
Describes the load lock chamber for substrate transport.
Details the reactor, showerhead, susceptor, and tungsten heater.
Covers the gas mixing system, components, and gas diagrams.
Shows the front and rear sides of the electrical cabinets.
Details vacuum pumps, diagrams, pressure control, and filters.
Explains water and pneumatic supply symbols and diagrams.
Describes the SCS for preventing unsafe system states and monitoring.
Provides guidelines for installation, setup, connection, and function checks.
Details system delivery, packaging structure, and packing symbols.
Covers unpacking procedures, hazard alerts, and transport methods.
Specifies environmental, vibration, media, space, and ventilation needs.
Covers user responsibility for interfaces and controlling gas supply.
Notes that assembly steps are not described in this manual.
Details final inspection and confirmation of safety functions.
Covers EMO/PROCESS-STOP buttons, main switch, and signal lamps.
Details glove box main switch, gloves, control panel, and pedal switches.
Describes reactor lid/chamber, key switch, and temperature control.
Covers the main switch for the heater supply unit.
Details the control unit for the thermostat heat bath.
Explains operation via server or client operator terminals.
Provides step-by-step procedures for system power on and off.
Covers actions inside the glove box and loading substrates.
Covers qualifications, inspections, contracts, logbooks, manuals, and spare parts.
Lists required auxiliary devices and handling of contaminated parts/waste.
Provides detailed maintenance schedules for various system components.
Explains the LOTO procedure for safe machinery shutdown.
Details elastomer seal materials, checking, and insertion.
Provides cleaning methods for quartz glass, SiC-coated graphite, and molybdenum parts.
Covers checking main switch, fuses, circuit breakers, and EMO buttons.
Details checking low power supply and fuses.
Includes checking control panel, replacing filters, and checking gloves.
Covers moving components, checking O-rings, and susceptor rotation.
Details checking pumps, clamps, throttle valves, and pneumatic valves.
Covers checking working pressure and EPV valves.
Includes removing/installing MO bubblers and performing MFC zero offset.
Details checking water pressure, cleaning filters, and checking flows.
Covers deactivating the system and recommended storage conditions.
Details personnel qualifications, safety regulations, and disposal methods.
Provides definitions for technical terms used throughout the manual.
General| Reactor Type | Planetary Reactor |
|---|---|
| Type | MOCVD System |
| Substrate Size | Up to 8-inch wafers |
| Deposition Method | Metal-Organic Chemical Vapor Deposition (MOCVD) |
| Materials | III-V compounds |
| Temperature Range | Up to 1200°C |
| Uniformity | High uniformity across the substrate |
| Throughput | High Throughput |
| Applications | LED Production, Power Electronics, Optoelectronic Devices |
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