AIXTRON CRIUS II - EMERGENCY-OFF Button; Safety Circuits

AIXTRON - Dokumentation CONFIDENTIAL 31
2
crius_II_en_00, Edition 06/2010
System Manual Safety
CRIUS II Safety circuits
2.6 Safety circuits
The CRIUS II is equipped with a safety-relevant electric circuit. This circuit is
triggered by the following events:
• An EMERGENCY-OFF button is pressed
• A PROCESS-STOP button is pressed
2.6.1 EMERGENCY-OFF button
EMERGENCY-OFF buttons outside the cabinets
Fig. 2-5,  31 shows a typical EMERGENCY-OFF button. EMERGENCY-
OFF buttons are red with a yellow collar.
Fig. 2-5 EMERGENCY-OFF buttons (outside the cabinets)
EMERGENCY-OFF buttons can be used to shut down the entire system if
dangerous situations crop up.
EMERGENCY-OFF buttons intside the cabinets
Additionally, the system is equipped with EMERGENCY-OFF buttons for
maintenance work with open cabinet doors. They are located inside the cabi-
nets.
Fig. 2-6 EMERGENCY-OFF buttons (intside the cabinets)