crius_II_en_00, Edition 06/2010
32 CONFIDENTIAL AIXTRON - Dokumentation
Safety System Manual
Safety circuits CRIUS II
2
Positions outside Fig. 2-7, 32 shows the EMERGENCY-OFF buttons installed at the outside
of the CRIUS II.
Fig. 2-7 Positions of the EMERGENCY-OFF buttons outside: Front side (top), back side (bottom)
A EMERGENCY-OFF button at the reactor cabinet
B EMERGENCY-OFF button at the heater supply unit
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