AIXTRON CRIUS II - Page 33

AIXTRON - Dokumentation CONFIDENTIAL 33
2
crius_II_en_00, Edition 06/2010
System Manual Safety
CRIUS II Safety circuits
Positions inside Fig. 2-7,  32 shows the EMERGENCY-OFF buttons installed inside the cab-
inets.
Fig. 2-8 Positions of the EMERGENCY-OFF buttons inside: Front side (top), back side (bottom)
A EMERGENCY-OFF button at the gas mixing cabinet
B EMERGENCY-OFF button at the reactor cabinet