crius_II_en_00, Edition 06/2010
34 CONFIDENTIAL AIXTRON - Dokumentation
Safety System Manual
Safety circuits CRIUS II
2
Consequence Pressing an EMERGENCY-OFF button has the following consequences:
• The power supply of the CRIUS II is switched off
Status after an
EMERGENCY-OFF
• Electrical power is switched off
• System is purged with nitrogen (reactor and source lines)
• Vacuum system is switched off (bypassed by check valves)
• All hydrogen and process gas valves are closed
• All pumps are switched off
• Reactor is cooled down
• Process heater is switched off
Switching the
system on after an
EMERGENCY-OFF
Only service personnel are authorized to restart operation after an EMER-
GENCY-OFF shutdown.
After an EMERGENCY-OFF shutdown the red power [OFF] button is flashing.
The flashing frequency indicates the EMO state.
1 Remove the cause for the EMERGENCY-OFF shutdown
2 In case of an EMO error check the function of the EMERGENCY-OFF
button
3 Release the EMERGENCY-OFF button
• The red power [OFF] button is illuminated
4 Press the green power [ON] button
• The red power [OFF] button gets dark
• The green power [ON] button is illuminated
The system is ready for operation.
NOTE:
The reactor cooling is guaranteed after an EMERGENCY-OFF shutdown.
EMO state
Flashing frequency
power [OFF] button
Description
EMO active 2 Hz An EMO button is pressed
EMO error 10 Hz An EMO button is pressed
There was a synchronisation error
when pressing the EMO button
In this case, check the function of
the EMO button by pressing and
releasing the button a few times
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