AIXTRON - Dokumentation CONFIDENTIAL 37
2
crius_II_en_00, Edition 06/2010
System Manual Safety
CRIUS II Safety circuits
2.6.3 Door locks
The doors of the CRIUS II are equipped with the following safety components:
•Sensors:
All cabinet doors are equipped with sensors which detect if the door is
closed. A process can only be started if all doors are closed.
• Active door locks:
Before a process starts, the closed doors will be locked automatically. This
prevents unintended opening of a door while a process is running.
Positions Fig. 2-11, 37 shows the active door locks installed at the CRIUS II.
Fig. 2-11 Positions of the active door locks: Front side (top), back side (bottom)
A Gas mixing cabinet
B Reactor cabinet
C Reactor cabinet
D Reactor cabinet
E Heater power supply unit
NOTE:
The lids without an active door lock (reactor cabinet, gas mixing cabinet)
are secured actively by the doors located below the lid.
To Next Page
Loading...