crius_II_en_00, Edition 06/2010
36 CONFIDENTIAL AIXTRON - Dokumentation
Safety System Manual
Safety circuits CRIUS II
2
Consequence Pressing a PROCESS-STOP button will switch the CRIUS II to the «safe
state». The following steps are performed:
• All gas lines are purged with nitrogen
• The throttle valve is closed
• All hydrogen and process gas valves are closed
• Process heater is switched off
• A running recipe is terminated
Switching the
system on after an
PROCESS-STOP
Only service personnel are authorized to restart operation after an PROCESS-
STOP.
1 Remove the cause for the PROCESS-STOP
2 Release the PROCESS-STOP button
3 Initiate a reset in AIXACT
The system is ready for operation.
NOTE:
A PROCESS STOP causes consequences according to the Cause Effect
table.
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