AIXTRON CRIUS II - Pneumatic Supply

crius_II_en_00, Edition 06/2010
96 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Media supply CRIUS II
3
3.9.2 Pneumatic supply
A pneumatic maintenance unit supplies the pneumatic components (e.g.
valves, clamps) of the CRIUS II with nitrogen via panels:
Panels • GMS panel
• Reactor Panel 1
• Reactor Panel 2
Component groups The pneumatic components are divided into the following groups:
• MO Source Supply
• Hydride Source Supply
•H
2
Source Supply
•H
2
Run Supply I
•H
2
Run Supply II
• Run/Vent I
• Run/Vent II
• Independent Valves
Fig. 3-49 Pneumatic supply
For details refer to the delivered pneumatic drawings.
GMS Panel Reactor Panel 2
Reactor Panel 1
B
A
C
E
D
G
H
I
F
A Pneumatic maintenance unit
BH
2
Source Supply + H
2
Run Supply I
C Hydride Source Supply
D MO Source Supply
EH
2
Run Supply II
F Independent Valves (Vac System)
G Run/Vent I
H Run/Vent II
I Independent Valves