AIXTRON CRIUS II - Page 95

AIXTRON - Dokumentation CONFIDENTIAL 95
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Media supply
Circuit 2
(with aluminum)
Fig. 3-47 Water diagram: Circuit 2
AInlet
B Heat exchanger
C Showerhead
D Circuit without Al components
EOutlet
Circuit 3
(without aluminum)
Fig. 3-48 Water diagram: Circuit 3
AInlet
B PSU heat exchanger
COutlet
AE
EVEV
EV EV
TT
PV
C
B
TT
TT
EV
D
AC
B