AIXTRON CRIUS II - Page 94

crius_II_en_00, Edition 06/2010
94 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Media supply CRIUS II
3
Circuit 1
(without aluminum)
Fig. 3-46 Water diagram: Circuit 1
PV
PV
PV
TT
D
C
B
B
B
B
AK
TT
DFS
TT
DFS
TT
DFS
E
TT
DFS
PV
E
TT
DFS
H
TT
DFS
TT
DFS
I
PI
F
G
J
AInlet
B Thermostat bath 1…x
C Process pump
D Glove box
E Power cables
F Exhaust tube 1
G Exhaust tube 2
H Bus bar
I Reactor base
J Reactor chamber
KOutlet