AIXTRON CRIUS II - N 2 Pistole (Optional); Vacuum Tweezers (Optional); Vacuum Wand (Optional)

crius_II_en_00, Edition 06/2010
118 CONFIDENTIAL AIXTRON - Dokumentation
Operation System Manual
Operating elements: Glove box CRIUS II
5
5.2.7 Vacuum wand (optional)
The vacuum wand is installed in the glove box. See Fig. 5-12,  118. It is oper-
ated with a pedal switch. See Chapter 5.2.5 Pedal switches,  117.
Fig. 5-12 Vacuum wand
5.2.8 Vacuum tweezers (optional)
The vacuum tweezers that is installed in the glove box is used to handle the
substrates.
Fig. 5-13 Vacuum tweezers
5.2.9 N
2
pistole (optional)
An N
2
pistol is installed inside of the glove box.
Fig. 5-14 N
2
pistol