AIXTRON CRIUS II - Page 30

crius_II_en_00, Edition 06/2010
30 CONFIDENTIAL AIXTRON - Dokumentation
Safety System Manual
Danger areas for maintenance and service personnel CRIUS II
2
Tab. 2-1 Characteristics and dangers of process gases
Phosphine
(PH
3
/ H
2
)
Color-
less
Disgust-
ing, garlic
taste
Toxic effect: Paralysis of
breathing tract and of cen-
tral nervous system
Irritation of the respiratory
tract
Very easily flammable,
self-ignition when exposed
to air
Burns explosively
Propane (C
3
H
8
)Color-
less
Odorless Difficulty in breathing Flammable
Sulphur hexaflu-
oride (SF
6
)
Color-
less
Odorless Difficulty in breathing
Silane (SiH
4
)Color-
less
Disgusting Irritations of the respiratory
tract, eyes and skin
Very easily flammable,
self-ignition when exposed
to air
Burns explosively
Explodes if exposed to
water
Trimethylbo-
rane (B(CH
3
)
3
,
TMB / H
2
)
Color-
less
Disgusting Toxic effect
Irritations of the respiratory
tract, eyes and skin
Very easily flammable,
self-ignition when exposed
to air
Burns explosively
Explodes if exposed to
water, oxidants and halo-
gens
Process gas Color Smell Main dangers for health Other risks