AIXTRON - Dokumentation CONFIDENTIAL 29
2
crius_II_en_00, Edition 06/2010
System Manual Safety
CRIUS II Danger areas for maintenance and service personnel
The following table gives a brief overview of characteristics and potential dan-
gers of the process gases used in the CRIUS II. For more information refer to
the MSDS (Material Safety Data Sheets).
NOTE:
The probability of occurrence of an unintended gas leak is very low. But
if, the most critical points for unintended gas release are the gas connec-
tions of the mass flow controllers and pressure controllers in the gas
mixing system.
NOTE:
Mixing of different gas types may cause further risks due to spontane-
ous chemical reactions. This may cause spontaneous ignition of gas
mixtures or an explosion.
Process gas Color Smell Main dangers for health Other risks
Ammonia (NH
3
)Color-
less
Pungent Inflammation of respiratory
tract, mucous membrane,
eyes and skin
Arsin (AsH
3
)Color-
less
Disgust-
ing, garlic
taste
Extremely toxic Very easily flammable
Dinitrogen mon-
oxide (N
2
O)
Color-
less
Sweet Difficulty in breathing
Narcotic effect
Ethylene (C
2
H
4
)Color-
less
Odorless Difficulty in breathing Very easily flammable
Helium (He) Color-
less
Odorless Difficulty in breathing
Hydrogen chlo-
ride (HCl)
Color-
less
Pungent Toxic effect
Very corrosive to the respi-
ratory tract, eyes and skin
Hydrogen (H
2
)Color-
less
Odorless Difficulty in breathing Explodes if exposed to oxi-
dizers, such as oxygen, air
and halogens
Easily flammable, burns
explosively
Methane (CH
4
)Color-
less
Odorless Difficulty in breathing Easily flammable, burns
explosively
Nitrogen (N
2
)Color-
less
Odorless Difficulty in breathing
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