AIXTRON CRIUS II - Page 89

AIXTRON - Dokumentation CONFIDENTIAL 89
3
crius_II_en_00, Edition 06/2010
System Manual Description
CRIUS II Vacuum system
DOR system
Fig. 3-40 Vacuum diagram: DOR
A Line for filling the DOR systems
B Line for evacuating the DOR system
C DOR pump
D Exhaust (to scrubber)
Vacuum cleaner,
vacuum tweezers
Fig. 3-41 Vacuum diagram: Vacuum cleaner
A
PV
PV
C
D
PT
B
A
A
B
D
F
C
E
G
HI
A Pump for vacuum cleaner
B Reactor
C Regeneration
D Vacuum cleaner
ETweezers
F Pump for vacuum tweezers
GH
2
sensor
HO
2
sensor
IH
2
O sensor