AIXTRON CRIUS II - Page 88

crius_II_en_00, Edition 06/2010
88 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Vacuum system CRIUS II
3
Reactor
Fig. 3-39 Vacuum diagram: Reactor
PV
M
C
F
G
E
PV
B
D
A
PV
PT
PV
PV
K
H
I
J
A Reactor
B Reactor isolation valve
C Exhaust filter device with cooling trap
D Throttle valve for controlling the reactor
pressure
E MO vacuum (for changing the MO bubbler)
F Process pump
G Exhaust (to scrubber)
H Pump bypass valve
I Vent bypass valve
J Vent/Vac valve
K Vent gas