crius_II_en_00, Edition 06/2010
26 CONFIDENTIAL AIXTRON - Dokumentation
Safety System Manual
Danger areas for maintenance and service personnel CRIUS II
2
WARNING! Mains voltage.
The system contains parts which are connected to the mains supply.
Touching these parts will cause an electric shock. The shock may be
lethal.
Prior to any work in the danger area:
• Lock out and tag out the main power supply (system main switch and
heater main switch)
• Ground the equipment
• Check to make sure that no one is in the danger area before you
switch the system on again
NOTE:
Only personnel who have completed electrotechnical professional train-
ing are permitted to perform work on the electrical equipment.
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