crius_II_en_00, Edition 06/2010
84 CONFIDENTIAL AIXTRON - Dokumentation
Description System Manual
Electrical supply CRIUS II
3
Back Fig. 3-35, 84 shows the rear side of the electrical cabinet.
Fig. 3-35 Electrical cabinet (rear side)
AMain fuses
B Over-current circuit breakers
C Main switch with RCD
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